Design Issues for Micro Electromechanical Systems (MEMS)
Pooja Sabherwal
Pooja Sabherwal, EECE Department Name, ITM University, Gurgaon, India.
Manuscript received on December 11, 2013. | Revised Manuscript received on December 15, 2013. | Manuscript published on December 25, 2013. | PP:7-9 | Volume-2 Issue-2, December 2013. | Retrieval Number: B0617122213/2013©BEIESP
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© The Authors. Published By: Blue Eyes Intelligence Engineering and Sciences Publication (BEIESP). This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/)
Abstract: This paperdiscusses the design issue in the field of MicroElectromechanical System(MEMS).MEMS offer the handheld and consumer electronics industry great hope for enhanced functionality. MEMS based accelerometers, microphones, pressure sensors, antennas, RF switches and embedded memory chips are being integrated with IC products and leading to new applications. Definition of MEMS as the name suggests, it is the electronic with the mechanical parts(moving/non moving)on the same chip in the microscale. MEMS is the type of enabling technology in VLSI where the most important thing is the ability to add value to the existing or new systems/Ips in the field.Design process of any implication begins with the definition of the problem and the required problem specification followed by the generation of concepts ,the evaluation of concepts and then the product design.
Keywords: MEMS,VLSI.